NANOMETRO® FR series
High-precision flatness measurement of ceramic plates and the like
This series incorporates a rotary air table and is capable of measuring the surface profile of ceramics plates for wafer polishing and disks of up to Φ 1000 mm, such as lapping tables etc.
Software for various measurements such as concentric circle measurements for in-depth evaluation and radial measurement for outline evaluation is availabele.
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Performance / Specifications
| Model |
NANOMETRO 700FR |
NANOMETRO 1000FR |
|---|---|---|
| Measuring area | φ700mm(max.) | φ1000mm(max.) |
| Overall accuracy | 0.4μm | 0.6μm |
| Repeatability | 0.05μm(σ) | |
| Display resolution | 0.01μm | |
| Measuring head | Electric micrometer | |
| Max. scanning speed (X axis) | 35mm/s | |
| Guide way |
X : Ceramics air guide ϴ : Air bearing |
|
| Drive system |
X : Linear motor ϴ : Servo motor |
|
| Maximum work mass | 60kg | 80kg |
